MORPHOLOGY AND OPTICAL PROPERTIES OF AlN FILMS ON SAPPHIRE
Subject of Research. The paper presents the results of an experimental study on morphology and optical properties of AlN films on sapphire. Thin AlN films on sapphire were used as experimental samples. Method. To obtain thin films, an ion beam deposition setup was used, which includes the ion source...
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| Главные авторы: | , , , , , , , |
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| Формат: | Статья |
| Язык: | Russian |
| Опубликовано: |
2024
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| Темы: | |
| Online-ссылка: | https://dspace.ncfu.ru/handle/123456789/29275 |
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