Pulsed laser deposition of gallium nitride thin films on sapphire substrates

Pulsed laser deposition of gallium nitride thin films on sapphire substrates

The results of an experimental study of the surface morphology and structural properties of thin films of gallium nitride on sapphire obtained by pulsed laser deposition are presented. Pulse laser sputtering of gallium nitride films was carried out by sputtering a liquid gallium target in an atmosph...

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書誌詳細
主要な著者:	Devitsky, O. V., Девицкий, О. В., Nikulin, D. A., Никулин, Д. А., Sysoev, I. A., Сысоев, И. А.
フォーマット:	Статья
言語:	English
出版事項:	American Institute of Physics Inc. 2021
主題:	Pulsed laser Gallium nitride Sapphire substrates Films of gallium nitride
オンライン･アクセス:	https://dspace.ncfu.ru/handle/20.500.12258/14768
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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