Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire

Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire

The results of an experimental study of the effect of thermal annealing on the structure, surface morphology and optical properties of thin films of aluminum nitride on sapphire are presented. Thin films of aluminum nitride on sapphire with a thickness of 200 nm were annealed in air and in a nitroge...

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Bibliografiska uppgifter
Huvudupphovsmän:	Devitsky, O. V., Девицкий, О. В., Kravtsov, A. A., Кравцов, А. А., Sysoev, I. A., Сысоев, И. А.
Materialtyp:	Статья
Språk:	Russian
Publicerad:	TVER STATE UNIV 2021
Ämnen:	Aluminum nitride Energy dispersive analysis Ion-beam deposition Thermal annealing Nanoheterostructures Sapphire Optical properties
Länkar:	https://dspace.ncfu.ru/handle/20.500.12258/14833
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

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