Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire
The results of an experimental study of the effect of thermal annealing on the structure, surface morphology and optical properties of thin films of aluminum nitride on sapphire are presented. Thin films of aluminum nitride on sapphire with a thickness of 200 nm were annealed in air and in a nitroge...
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| Main Authors: | , , , , , |
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| Format: | Статья |
| Language: | Russian |
| Published: |
TVER STATE UNIV
2021
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| Subjects: | |
| Online Access: | https://dspace.ncfu.ru/handle/20.500.12258/14833 |
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