Ambartsumov, M. G., Амбарцумов, М. Г., Tarala, V. A., Тарала, В. А., Nikova, M. S., Никова, М. С., . . . Крандиевский, С. О. (2021). Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD. Elsevier Ltd.
Chicago (17e ed.) BronvermeldingAmbartsumov, M. G., М. Г Амбарцумов, V. A. Tarala, В. А Тарала, M. S. Nikova, М. С Никова, S. O. Krandievsky, en С. О Крандиевский. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.
MLA (8e ed.) BronvermeldingAmbartsumov, M. G., et al. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.