Ambartsumov, M. G., Амбарцумов, М. Г., Tarala, V. A., Тарала, В. А., Nikova, M. S., Никова, М. С., . . . Крандиевский, С. О. (2021). Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD. Elsevier Ltd.
Citace podle Chicago (17th ed.)Ambartsumov, M. G., М. Г Амбарцумов, V. A. Tarala, В. А Тарала, M. S. Nikova, М. С Никова, S. O. Krandievsky, a С. О Крандиевский. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.
Citace podle MLA (8th ed.)Ambartsumov, M. G., et al. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.