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APA (7th ed.) Citation

Ambartsumov, M. G., Амбарцумов, М. Г., Tarala, V. A., Тарала, В. А., Nikova, M. S., Никова, М. С., . . . Крандиевский, С. О. (2021). Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD. Elsevier Ltd.

Chicago Style (17th ed.) Citation

Ambartsumov, M. G., М. Г Амбарцумов, V. A. Tarala, В. А Тарала, M. S. Nikova, М. С Никова, S. O. Krandievsky, and С. О Крандиевский. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.

MLA (8th ed.) Citation

Ambartsumov, M. G., et al. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.