Ambartsumov, M. G., Амбарцумов, М. Г., Tarala, V. A., Тарала, В. А., Nikova, M. S., Никова, М. С., . . . Крандиевский, С. О. (2021). Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD. Elsevier Ltd.
Цитирование в стиле Чикаго (17-е изд.)Ambartsumov, M. G., М. Г Амбарцумов, V. A. Tarala, В. А Тарала, M. S. Nikova, М. С Никова, S. O. Krandievsky, и С. О Крандиевский. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.
Цитирование MLA (8-е изд.)Ambartsumov, M. G., et al. Influence of Coating Thickness on the Microstructure, Composition and Optical Properties of Aluminum Nitride Thin Films Grown on Silicon Substrates via Low-temperature PEALD. Elsevier Ltd, 2021.