Influence of magnetron sputtering conditions on the structure and surface morphology of InxGa1–xAs thin films on a GaAs (100) substrate
We present the results of the study of the structure and surface morphology of In x Ga1–x As thin films on a GaAs substrate. Thin films were obtained by magnetron sputtering from a specially formed In 0.45 Ga 0.55 As target in an argon atmosphere. The obtained samples of thin films were studied by...
Saved in:
| Main Authors: | , , , , , , , , , , , , , |
|---|---|
| Format: | Статья |
| Language: | Russian |
| Published: |
2023
|
| Subjects: | |
| Online Access: | https://dspace.ncfu.ru/handle/20.500.12258/22295 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|