APA (7th ed.) Citation
Tarala, V. A., Тарала, В. А., Ambartsumov, M. G., Амбарцумов, М. Г., Altakhov, A. S., Алтахов, А. С., . . . Шевченко, М. Ю. (2018). Growing c-axis oriented aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures. Elsevier B.V.
Chicago Style (17th ed.) CitationTarala, V. A., et al. Growing C-axis Oriented Aluminum Nitride Films by Plasma-enhanced Atomic Layer Deposition at Low Temperatures. Elsevier B.V, 2018.
MLA (8th ed.) CitationTarala, V. A., et al. Growing C-axis Oriented Aluminum Nitride Films by Plasma-enhanced Atomic Layer Deposition at Low Temperatures. Elsevier B.V, 2018.
Warning: These citations may not always be 100% accurate.