Features of ion-beam polishing of the surface of sapphire

The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam para...

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Huvudupphovsmän:	Sysoev, I. A., Сысоев, И. А.
Materialtyp:	Статья
Språk:	English
Publicerad:	Pleiades Publishing 2018
Ämnen:	Ar ion beam Ion-beam treatment Roughness of thesapphire surface Ion beams
Länkar:	https://www.scopus.com/record/display.uri?eid=2-s2.0-85054654383&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=73163b622bfc400f97e8a3c6b647917e&sot=afnl&sdt=afsp&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=27&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3340
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record_format	dspace
spelling	ir-20.500.12258-33402020-07-29T14:15:40Z Features of ion-beam polishing of the surface of sapphire Sysoev, I. A. Сысоев, И. А. Ar ion beam Ion-beam treatment Roughness of thesapphire surface Ion beams The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam parameters are determined, at which the surface roughness after polishing decreases to 0.8 nm. At angles α = 20°–30°, the relief of the sapphire surface is found to become wavy. The study of the impact of the ion energy on the roughness of the sapphire surface in the 400–1200-eV range reveals that an increase in the energy of the ion beam to 1200 eV is accompanied with a decrease by 8.8 times in the roughness which falls below the level of 3 nm 2018-10-26T09:48:11Z 2018-10-26T09:48:11Z 2018 Статья Lunin, L.S., Sinel’nikov, B.M., Sysoev, I.A. Features of Ion-Beam Polishing of the Surface of Sapphire // Journal of Surface Investigation. - 2018. - Volume 12. - Issue 5. - Pages 898-901 https://www.scopus.com/record/display.uri?eid=2-s2.0-85054654383&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=73163b622bfc400f97e8a3c6b647917e&sot=afnl&sdt=afsp&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=27&citeCnt=0&searchTerm= http://hdl.handle.net/20.500.12258/3340 en Journal of Surface Investigation application/pdf application/pdf Pleiades Publishing
institution	СКФУ
collection	Репозиторий
language	English
topic	Ar ion beam Ion-beam treatment Roughness of thesapphire surface Ion beams
spellingShingle	Ar ion beam Ion-beam treatment Roughness of thesapphire surface Ion beams Sysoev, I. A. Сысоев, И. А. Features of ion-beam polishing of the surface of sapphire
description	The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam parameters are determined, at which the surface roughness after polishing decreases to 0.8 nm. At angles α = 20°–30°, the relief of the sapphire surface is found to become wavy. The study of the impact of the ion energy on the roughness of the sapphire surface in the 400–1200-eV range reveals that an increase in the energy of the ion beam to 1200 eV is accompanied with a decrease by 8.8 times in the roughness which falls below the level of 3 nm
format	Статья
author	Sysoev, I. A. Сысоев, И. А.
author_facet	Sysoev, I. A. Сысоев, И. А.
author_sort	Sysoev, I. A.
title	Features of ion-beam polishing of the surface of sapphire
title_short	Features of ion-beam polishing of the surface of sapphire
title_full	Features of ion-beam polishing of the surface of sapphire
title_fullStr	Features of ion-beam polishing of the surface of sapphire
title_full_unstemmed	Features of ion-beam polishing of the surface of sapphire
title_sort	features of ion-beam polishing of the surface of sapphire
publisher	Pleiades Publishing
publishDate	2018
url	https://www.scopus.com/record/display.uri?eid=2-s2.0-85054654383&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=73163b622bfc400f97e8a3c6b647917e&sot=afnl&sdt=afsp&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=27&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3340
work_keys_str_mv	AT sysoevia featuresofionbeampolishingofthesurfaceofsapphire AT sysoevia featuresofionbeampolishingofthesurfaceofsapphire
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Features of ion-beam polishing of the surface of sapphire

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