APA (7th ed.) Citation
Ambartsumov, M. G., Амбарцумов, М. Г., Tarala, V. A., Тарала, В. А., Krandievsky, S. O., Крандиевский, С. О., . . . Митрофаненко, Л. М. (2019). The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles. Elsevier B.V.
Chicago Style (17th ed.) CitationAmbartsumov, M. G., et al. The Dependence of Aluminum Nitride Thin-film Microstructure on the Number of Low-temperature Plasma-enhanced Atomic Layer Deposition Process Cycles. Elsevier B.V, 2019.
MLA (8th ed.) CitationAmbartsumov, M. G., et al. The Dependence of Aluminum Nitride Thin-film Microstructure on the Number of Low-temperature Plasma-enhanced Atomic Layer Deposition Process Cycles. Elsevier B.V, 2019.
Warning: These citations may not always be 100% accurate.