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Cita APA (7th ed.)

Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Ambartsumov, M. G., Амбарцумов, М. Г., . . . Шевченко, М. Ю. (2018). Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method. Institute of Electrical and Electronics Engineers Inc.

Cita Chicago (17th ed.)

Tarala, V. A., et al. Growth of Heteroepitaxial Aluminium Nitride Films on Aluminium Oxide Substrates via PEALD Method. Institute of Electrical and Electronics Engineers Inc, 2018.

Cita MLA (8th ed.)

Tarala, V. A., et al. Growth of Heteroepitaxial Aluminium Nitride Films on Aluminium Oxide Substrates via PEALD Method. Institute of Electrical and Electronics Engineers Inc, 2018.