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APA (7th ed.) Citation

Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Ambartsumov, M. G., Амбарцумов, М. Г., . . . Шевченко, М. Ю. (2018). Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method. Institute of Electrical and Electronics Engineers Inc.

Chicago Style (17th ed.) Citation

Tarala, V. A., et al. Growth of Heteroepitaxial Aluminium Nitride Films on Aluminium Oxide Substrates via PEALD Method. Institute of Electrical and Electronics Engineers Inc, 2018.

MLA (8th ed.) Citation

Tarala, V. A., et al. Growth of Heteroepitaxial Aluminium Nitride Films on Aluminium Oxide Substrates via PEALD Method. Institute of Electrical and Electronics Engineers Inc, 2018.

Warning: These citations may not always be 100% accurate.