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Cita APA (7a ed.)

Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Ambartsumov, M. G., Амбарцумов, М. Г., . . . Шевченко, М. Ю. (2018). Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method. Institute of Electrical and Electronics Engineers Inc.

Cita Chicago Style (17a ed.)

Tarala, V. A., et al. Growth of Heteroepitaxial Aluminium Nitride Films on Aluminium Oxide Substrates via PEALD Method. Institute of Electrical and Electronics Engineers Inc, 2018.

Cita MLA (8a ed.)

Tarala, V. A., et al. Growth of Heteroepitaxial Aluminium Nitride Films on Aluminium Oxide Substrates via PEALD Method. Institute of Electrical and Electronics Engineers Inc, 2018.