Pulsed laser deposition of aluminum nitride thin films onto sapphire substrates
The paper presents experimental study results of surface morphology and structural and optical properties of sapphire AlN films obtained by pulsed laser spraying. Method. Thin AlN films on sapphire were used as experimental samples. The preparation of AlN films was carried out using a combined insta...
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| Main Authors: | , , , , , |
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| Format: | Статья |
| Language: | English |
| Published: |
ITMO University
2020
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| Subjects: | |
| Online Access: | https://dspace.ncfu.ru/handle/20.500.12258/14698 |
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