Pulsed laser deposition of gallium nitride thin films on sapphire substrates

Pulsed laser deposition of gallium nitride thin films on sapphire substrates

The results of an experimental study of the surface morphology and structural properties of thin films of gallium nitride on sapphire obtained by pulsed laser deposition are presented. Pulse laser sputtering of gallium nitride films was carried out by sputtering a liquid gallium target in an atmosph...

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Главные авторы:	Devitsky, O. V., Девицкий, О. В., Nikulin, D. A., Никулин, Д. А., Sysoev, I. A., Сысоев, И. А.
格式:	Статья
语言:	English
出版:	American Institute of Physics Inc. 2021
主题:	Pulsed laser Gallium nitride Sapphire substrates Films of gallium nitride
在线阅读:	https://dspace.ncfu.ru/handle/20.500.12258/14768
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