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Pulsed laser deposition of gallium nitride thin films on sapphire substrates

The results of an experimental study of the surface morphology and structural properties of thin films of gallium nitride on sapphire obtained by pulsed laser deposition are presented. Pulse laser sputtering of gallium nitride films was carried out by sputtering a liquid gallium target in an atmosph...

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Главные авторы: Devitsky, O. V., Девицкий, О. В., Nikulin, D. A., Никулин, Д. А., Sysoev, I. A., Сысоев, И. А.
Format: Статья
Sprog:English
Udgivet: American Institute of Physics Inc. 2021
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Online adgang:https://dspace.ncfu.ru/handle/20.500.12258/14768
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