Pulsed laser deposition of gallium nitride thin films on sapphire substrates
The results of an experimental study of the surface morphology and structural properties of thin films of gallium nitride on sapphire obtained by pulsed laser deposition are presented. Pulse laser sputtering of gallium nitride films was carried out by sputtering a liquid gallium target in an atmosph...
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| Hauptverfasser: | , , , , , |
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| Format: | Статья |
| Sprache: | English |
| Veröffentlicht: |
American Institute of Physics Inc.
2021
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| Schlagworte: | |
| Online Zugang: | https://dspace.ncfu.ru/handle/20.500.12258/14768 |
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