Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire

Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire

The results of an experimental study of the effect of thermal annealing on the structure, surface morphology and optical properties of thin films of aluminum nitride on sapphire are presented. Thin films of aluminum nitride on sapphire with a thickness of 200 nm were annealed in air and in a nitroge...

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Главные авторы:	Devitsky, O. V., Девицкий, О. В., Kravtsov, A. A., Кравцов, А. А., Sysoev, I. A., Сысоев, И. А.
格式:	Статья
語言:	Russian
出版:	TVER STATE UNIV 2021
主題:	Aluminum nitride Energy dispersive analysis Ion-beam deposition Thermal annealing Nanoheterostructures Sapphire Optical properties
在線閱讀:	https://dspace.ncfu.ru/handle/20.500.12258/14833
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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