Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD
Within the framework of the study, fine-grained nanocrystalline aluminum nitride films were obtained using the PEALD method at the temperature of 250 degrees C and the number of deposition cycles from 80 to 500 on single-crystal silicon substrates. Low-temperature synthesis processes were carried ou...
Сохранить в:
| Главные авторы: | , , , , , , , |
|---|---|
| Format: | Статья |
| Sprog: | English |
| Udgivet: |
Elsevier Ltd
2021
|
| Fag: | |
| Online adgang: | https://dspace.ncfu.ru/handle/20.500.12258/18458 |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|