Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD
Within the framework of the study, fine-grained nanocrystalline aluminum nitride films were obtained using the PEALD method at the temperature of 250 degrees C and the number of deposition cycles from 80 to 500 on single-crystal silicon substrates. Low-temperature synthesis processes were carried ou...
Збережено в:
| Автори: | , , , , , , , |
|---|---|
| Формат: | Статья |
| Мова: | English |
| Опубліковано: |
Elsevier Ltd
2021
|
| Предмети: | |
| Онлайн доступ: | https://dspace.ncfu.ru/handle/20.500.12258/18458 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|