Influence of magnetron sputtering conditions on the structure and surface morphology of InxGa1–xAs thin films on a GaAs (100) substrate
We present the results of the study of the structure and surface morphology of In x Ga1–x As thin films on a GaAs substrate. Thin films were obtained by magnetron sputtering from a specially formed In 0.45 Ga 0.55 As target in an argon atmosphere. The obtained samples of thin films were studied by...
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| Hauptverfasser: | , , , , , , , , , , , , , |
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| Format: | Статья |
| Sprache: | Russian |
| Veröffentlicht: |
2023
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| Schlagworte: | |
| Online Zugang: | https://dspace.ncfu.ru/handle/20.500.12258/22295 |
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