Influence of magnetron sputtering conditions on the structure and surface morphology of InxGa1–xAs thin films on a GaAs (100) substrate
We present the results of the study of the structure and surface morphology of In x Ga1–x As thin films on a GaAs substrate. Thin films were obtained by magnetron sputtering from a specially formed In 0.45 Ga 0.55 As target in an argon atmosphere. The obtained samples of thin films were studied by...
Gorde:
| Egile Nagusiak: | , , , , , , , , , , , , , |
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| Formatua: | Статья |
| Hizkuntza: | Russian |
| Argitaratua: |
2023
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| Gaiak: | |
| Sarrera elektronikoa: | https://dspace.ncfu.ru/handle/20.500.12258/22295 |
| Etiketak: |
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