Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method

Показать другие версии (1)

Research was performed on possibility of growth of heteroepitaxial aluminum nitride films on (0001) sapphire substrates within 210 to 300 degrees Celsius temperature range via plasma-enhanced atomic layer deposition. Samples created were studied by ellipsometry, x-ray diffraction analysis and rockin...

Fuld beskrivelse

Сохранить в:

Bibliografiske detaljer
Главные авторы:	Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Ambartsumov, M. G., Амбарцумов, М. Г., Martens, V. Y., Мартенс, В. Я., Shevchenko, M. Y., Шевченко, М. Ю.
Format:	Статья
Sprog:	English
Udgivet:	Institute of Electrical and Electronics Engineers Inc. 2018
Fag:	Aluminum coatings Atomic layer deposition Epitaxial growth Refractive index Oxide films Aluminum nitride
Online adgang:	https://www.scopus.com/record/display.uri?eid=2-s2.0-85017584082&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=4a2a77c64cce8892f9521d5be1c7d9a7&sot=afnl&sdt=sisr&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&ref=%28Growth+of+heteroepitaxial+aluminium+nitride+films+on+aluminium+oxide+substrates+via+PEALD+method%29&relpos=0&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3039
Tags:	Tilføj Tag Ingen Tags, Vær først til at tagge denne postø!

Lignende værker

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
af: Tarala, V. A., и др.
Udgivet: (2018)

Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
af: Tarala, V. A., и др.
Udgivet: (2018)

Growing c-axis oriented aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
af: Tarala, V. A., и др.
Udgivet: (2018)

Growing aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
af: Tarala, V. A., и др.
Udgivet: (2018)

Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD
af: Ambartsumov, M. G., и др.
Udgivet: (2021)

The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles
af: Ambartsumov, M. G., и др.
Udgivet: (2019)

Ion-beam deposition of thin AlN films on Al2O3 substrate
af: Devitsky, O. V., и др.
Udgivet: (2020)

Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire
af: Devitsky, O. V., и др.
Udgivet: (2021)

Optical spectroscopy of the Er3+ion in BaY2F8crystal and YSAG ceramics
af: Tarala, V. A., и др.
Udgivet: (2022)

Sintering and microstructure evolution of Er1.5Y1.5-xScx+yAl5-yO12 garnet ceramics with scandium in dodecahedral and octahedral sites
af: Nikova, M. S., и др.
Udgivet: (2022)

Judd-Ofelt Analysis of High Erbium Content Yttrium-Aluminum and Yttrium-Scandium-Aluminum Garnet Ceramics
af: Nikova, M. S., и др.
Udgivet: (2022)

Optical properties of YSAG: Yb: Er ceramics with Sc3+ cations in the dodecahedral and octahedral positions of the garnet crystal lattice
af: Tarala, V. A., и др.
Udgivet: (2024)

SYNTHESIS AND INVESTIGATION OF PROPERTIES OF COMPOSITE CERAMICS LuAG: Ce / Al2O3
af: Lapin, V. A., и др.
Udgivet: (2024)

Synthesis of Y3Al5O12:Ce Powders for X-ray Luminescent Diamond Composites
af: Vakalov, D. S., и др.
Udgivet: (2023)

Using silver nanoparticles for the increase of YAG: Ce luminescence
af: Kravtsov, A. A., и др.
Udgivet: (2022)

Investigation of the Vacuum Sintering Kinetics of the Optical Luminescent Ceramic Y3–xScxAl5O12:Cr
af: Lapin, V. A., и др.
Udgivet: (2024)

Impact of magnesium oxide concentration and yttrium-aluminum garnet stoichiometry deviation on the microstructure and optical transmission of yag-based ceramics
af: Malyavin, F. F., и др.
Udgivet: (2022)

X-ray luminescence of diamond composite films containing yttrium-aluminum garnet nanoparticles with varied composition of Sc–Ce doping
af: Vakalov, D. S., и др.
Udgivet: (2021)

The influence of Sc3+ions on fluorescence lifetime of Yb3+in Yb-doped yttrium scandium aluminum garnet (Yb:YSAG) ceramics
af: Nikova, M. S., и др.
Udgivet: (2022)

Effect of different fluxes on YAG:Ce illumination engineering parameters
af: Shama, M. S., и др.
Udgivet: (2018)

Diamond composite with embedded YAG:Ce nanoparticles as a source of fast X-ray luminescence in the visible and near-IR range
af: Vakalov, D. S., и др.
Udgivet: (2021)

Morphofunctional condition of bones and hippocampus of white rats at experimental intoxication with aluminium chloride
af: Timchenko, L. D., и др.
Udgivet: (2018)

The impact of yttrium aluminum garnet stoichiometry deviation on the conversion efficiency of tetravalent chromium ions
af: Malyavin, F. F., и др.
Udgivet: (2022)

Pulsed laser deposition of gallium nitride thin films on sapphire substrates
af: Devitsky, O. V., и др.
Udgivet: (2021)

Influence of the preparation "Nicavet-1000" on a morphofunctional condition of some organs of rats at experimental aluminium intoxication
af: Timchenko, L. D., и др.
Udgivet: (2018)

Determination of the complex refractive index of nanoparticulate magnetite from optical anisotropy data for magnetic colloids
af: Yerin K. V., и др.
Udgivet: (2022)

Pulsed laser deposition of aluminum nitride thin films onto sapphire substrates
af: Devitsky, O. V., и др.
Udgivet: (2020)

SPECTRAL DEPENDENCIES OF MAGNETOOPTICAL EFFECTS IN MAGNETIC FLUIDS
af: Yerin K. V., и др.
Udgivet: (2022)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
af: Tarala, V. A., и др.
Udgivet: (2018)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
af: Tarala, V. A., и др.
Udgivet: (2018)

Algorithm for the Joint Flight of Two Uncrewed Aerial Vehicles Constituting a Bistatic Radar System for the Soil Remote Sensing
af: Linets, G. I., и др.
Udgivet: (2023)

Electrically controlled reflection from a thin film at a glycerin-magnetic-liquid boundary
af: Chekanov, V. V., и др.
Udgivet: (2019)

Amorphous carbon buffer layers for separating free gallium nitride films
af: Altakhov, A. S., и др.
Udgivet: (2018)

Epitaxial growth of GaInAsBi thin films on Si (001) substrate using pulsed laser deposition
af: Pashchenko, A. S., и др.
Udgivet: (2024)

Growth of nanotextured thin films of GaInAsP and GaInAsSbBi solid solutions on GaP substrates by pulsed laser deposition
af: Pashchenko, A. S., и др.
Udgivet: (2023)

Growth of Man — like Growth of Nature
af: Emily E. D.
Udgivet: (2013)

The complex compaction method of an unstable loess substrate
af: Steshenko, D. M., и др.
Udgivet: (2018)

Improved road embankment loess substrate under earthquake hazards
af: Steshenko, D. M.
Udgivet: (2019)

Perspectives of economic growth of Russia in the conditions of information society
af: Novikova, I. V., и др.
Udgivet: (2018)

THE GROWTH OF INALN/ SI HETEROSTRUCTURES WITH A HIGH CONTENT OF IN
af: Lapin, V. A., и др.
Udgivet: (2023)