Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method

Показать другие версии (1)

Research was performed on possibility of growth of heteroepitaxial aluminum nitride films on (0001) sapphire substrates within 210 to 300 degrees Celsius temperature range via plasma-enhanced atomic layer deposition. Samples created were studied by ellipsometry, x-ray diffraction analysis and rockin...

Deskribapen osoa

Gorde:

Xehetasun bibliografikoak
Egile Nagusiak:	Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Ambartsumov, M. G., Амбарцумов, М. Г., Martens, V. Y., Мартенс, В. Я., Shevchenko, M. Y., Шевченко, М. Ю.
Formatua:	Статья
Hizkuntza:	English
Argitaratua:	Institute of Electrical and Electronics Engineers Inc. 2018
Gaiak:	Aluminum coatings Atomic layer deposition Epitaxial growth Refractive index Oxide films Aluminum nitride
Sarrera elektronikoa:	https://www.scopus.com/record/display.uri?eid=2-s2.0-85017584082&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=4a2a77c64cce8892f9521d5be1c7d9a7&sot=afnl&sdt=sisr&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&ref=%28Growth+of+heteroepitaxial+aluminium+nitride+films+on+aluminium+oxide+substrates+via+PEALD+method%29&relpos=0&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3039
Etiketak:	Etiketa erantsi Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!

Antzeko izenburuak

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
nork: Tarala, V. A., et al.
Argitaratua: (2018)

Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
nork: Tarala, V. A., et al.
Argitaratua: (2018)

Growing c-axis oriented aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
nork: Tarala, V. A., et al.
Argitaratua: (2018)

Growing aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
nork: Tarala, V. A., et al.
Argitaratua: (2018)

Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD
nork: Ambartsumov, M. G., et al.
Argitaratua: (2021)

The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles
nork: Ambartsumov, M. G., et al.
Argitaratua: (2019)

Ion-beam deposition of thin AlN films on Al2O3 substrate
nork: Devitsky, O. V., et al.
Argitaratua: (2020)

Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire
nork: Devitsky, O. V., et al.
Argitaratua: (2021)

Optical spectroscopy of the Er3+ion in BaY2F8crystal and YSAG ceramics
nork: Tarala, V. A., et al.
Argitaratua: (2022)

Sintering and microstructure evolution of Er1.5Y1.5-xScx+yAl5-yO12 garnet ceramics with scandium in dodecahedral and octahedral sites
nork: Nikova, M. S., et al.
Argitaratua: (2022)

Judd-Ofelt Analysis of High Erbium Content Yttrium-Aluminum and Yttrium-Scandium-Aluminum Garnet Ceramics
nork: Nikova, M. S., et al.
Argitaratua: (2022)

Optical properties of YSAG: Yb: Er ceramics with Sc3+ cations in the dodecahedral and octahedral positions of the garnet crystal lattice
nork: Tarala, V. A., et al.
Argitaratua: (2024)

SYNTHESIS AND INVESTIGATION OF PROPERTIES OF COMPOSITE CERAMICS LuAG: Ce / Al2O3
nork: Lapin, V. A., et al.
Argitaratua: (2024)

Synthesis of Y3Al5O12:Ce Powders for X-ray Luminescent Diamond Composites
nork: Vakalov, D. S., et al.
Argitaratua: (2023)

Using silver nanoparticles for the increase of YAG: Ce luminescence
nork: Kravtsov, A. A., et al.
Argitaratua: (2022)

Investigation of the Vacuum Sintering Kinetics of the Optical Luminescent Ceramic Y3–xScxAl5O12:Cr
nork: Lapin, V. A., et al.
Argitaratua: (2024)

Impact of magnesium oxide concentration and yttrium-aluminum garnet stoichiometry deviation on the microstructure and optical transmission of yag-based ceramics
nork: Malyavin, F. F., et al.
Argitaratua: (2022)

X-ray luminescence of diamond composite films containing yttrium-aluminum garnet nanoparticles with varied composition of Sc–Ce doping
nork: Vakalov, D. S., et al.
Argitaratua: (2021)

The influence of Sc3+ions on fluorescence lifetime of Yb3+in Yb-doped yttrium scandium aluminum garnet (Yb:YSAG) ceramics
nork: Nikova, M. S., et al.
Argitaratua: (2022)

Effect of different fluxes on YAG:Ce illumination engineering parameters
nork: Shama, M. S., et al.
Argitaratua: (2018)

Diamond composite with embedded YAG:Ce nanoparticles as a source of fast X-ray luminescence in the visible and near-IR range
nork: Vakalov, D. S., et al.
Argitaratua: (2021)

Morphofunctional condition of bones and hippocampus of white rats at experimental intoxication with aluminium chloride
nork: Timchenko, L. D., et al.
Argitaratua: (2018)

The impact of yttrium aluminum garnet stoichiometry deviation on the conversion efficiency of tetravalent chromium ions
nork: Malyavin, F. F., et al.
Argitaratua: (2022)

Pulsed laser deposition of gallium nitride thin films on sapphire substrates
nork: Devitsky, O. V., et al.
Argitaratua: (2021)

Influence of the preparation "Nicavet-1000" on a morphofunctional condition of some organs of rats at experimental aluminium intoxication
nork: Timchenko, L. D., et al.
Argitaratua: (2018)

Determination of the complex refractive index of nanoparticulate magnetite from optical anisotropy data for magnetic colloids
nork: Yerin K. V., et al.
Argitaratua: (2022)

Pulsed laser deposition of aluminum nitride thin films onto sapphire substrates
nork: Devitsky, O. V., et al.
Argitaratua: (2020)

SPECTRAL DEPENDENCIES OF MAGNETOOPTICAL EFFECTS IN MAGNETIC FLUIDS
nork: Yerin K. V., et al.
Argitaratua: (2022)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
nork: Tarala, V. A., et al.
Argitaratua: (2018)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
nork: Tarala, V. A., et al.
Argitaratua: (2018)

Algorithm for the Joint Flight of Two Uncrewed Aerial Vehicles Constituting a Bistatic Radar System for the Soil Remote Sensing
nork: Linets, G. I., et al.
Argitaratua: (2023)

Electrically controlled reflection from a thin film at a glycerin-magnetic-liquid boundary
nork: Chekanov, V. V., et al.
Argitaratua: (2019)

Amorphous carbon buffer layers for separating free gallium nitride films
nork: Altakhov, A. S., et al.
Argitaratua: (2018)

Epitaxial growth of GaInAsBi thin films on Si (001) substrate using pulsed laser deposition
nork: Pashchenko, A. S., et al.
Argitaratua: (2024)

Growth of nanotextured thin films of GaInAsP and GaInAsSbBi solid solutions on GaP substrates by pulsed laser deposition
nork: Pashchenko, A. S., et al.
Argitaratua: (2023)

Growth of Man — like Growth of Nature
nork: Emily E. D.
Argitaratua: (2013)

The complex compaction method of an unstable loess substrate
nork: Steshenko, D. M., et al.
Argitaratua: (2018)

Improved road embankment loess substrate under earthquake hazards
nork: Steshenko, D. M.
Argitaratua: (2019)

Perspectives of economic growth of Russia in the conditions of information society
nork: Novikova, I. V., et al.
Argitaratua: (2018)

THE GROWTH OF INALN/ SI HETEROSTRUCTURES WITH A HIGH CONTENT OF IN
nork: Lapin, V. A., et al.
Argitaratua: (2023)