Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method

Toon andere (1) versies

Research was performed on possibility of growth of heteroepitaxial aluminum nitride films on (0001) sapphire substrates within 210 to 300 degrees Celsius temperature range via plasma-enhanced atomic layer deposition. Samples created were studied by ellipsometry, x-ray diffraction analysis and rockin...

Volledige beschrijving

Bewaard in:

Bibliografische gegevens
Hoofdauteurs:	Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Ambartsumov, M. G., Амбарцумов, М. Г., Martens, V. Y., Мартенс, В. Я., Shevchenko, M. Y., Шевченко, М. Ю.
Formaat:	Статья
Taal:	English
Gepubliceerd in:	Institute of Electrical and Electronics Engineers Inc. 2018
Onderwerpen:	Aluminum coatings Atomic layer deposition Epitaxial growth Refractive index Oxide films Aluminum nitride
Online toegang:	https://www.scopus.com/record/display.uri?eid=2-s2.0-85017584082&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=4a2a77c64cce8892f9521d5be1c7d9a7&sot=afnl&sdt=sisr&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&ref=%28Growth+of+heteroepitaxial+aluminium+nitride+films+on+aluminium+oxide+substrates+via+PEALD+method%29&relpos=0&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3039
Tags:	Voeg label toe Geen labels, Wees de eerste die dit record labelt!

Gelijkaardige items

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
door: Tarala, V. A., et al.
Gepubliceerd in: (2018)

Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
door: Tarala, V. A., et al.
Gepubliceerd in: (2018)

Growing c-axis oriented aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
door: Tarala, V. A., et al.
Gepubliceerd in: (2018)

Growing aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
door: Tarala, V. A., et al.
Gepubliceerd in: (2018)

Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD
door: Ambartsumov, M. G., et al.
Gepubliceerd in: (2021)

The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles
door: Ambartsumov, M. G., et al.
Gepubliceerd in: (2019)

Ion-beam deposition of thin AlN films on Al2O3 substrate
door: Devitsky, O. V., et al.
Gepubliceerd in: (2020)

Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire
door: Devitsky, O. V., et al.
Gepubliceerd in: (2021)

Optical spectroscopy of the Er3+ion in BaY2F8crystal and YSAG ceramics
door: Tarala, V. A., et al.
Gepubliceerd in: (2022)

Sintering and microstructure evolution of Er1.5Y1.5-xScx+yAl5-yO12 garnet ceramics with scandium in dodecahedral and octahedral sites
door: Nikova, M. S., et al.
Gepubliceerd in: (2022)

Judd-Ofelt Analysis of High Erbium Content Yttrium-Aluminum and Yttrium-Scandium-Aluminum Garnet Ceramics
door: Nikova, M. S., et al.
Gepubliceerd in: (2022)

Optical properties of YSAG: Yb: Er ceramics with Sc3+ cations in the dodecahedral and octahedral positions of the garnet crystal lattice
door: Tarala, V. A., et al.
Gepubliceerd in: (2024)

SYNTHESIS AND INVESTIGATION OF PROPERTIES OF COMPOSITE CERAMICS LuAG: Ce / Al2O3
door: Lapin, V. A., et al.
Gepubliceerd in: (2024)

Synthesis of Y3Al5O12:Ce Powders for X-ray Luminescent Diamond Composites
door: Vakalov, D. S., et al.
Gepubliceerd in: (2023)

Using silver nanoparticles for the increase of YAG: Ce luminescence
door: Kravtsov, A. A., et al.
Gepubliceerd in: (2022)

Investigation of the Vacuum Sintering Kinetics of the Optical Luminescent Ceramic Y3–xScxAl5O12:Cr
door: Lapin, V. A., et al.
Gepubliceerd in: (2024)

Impact of magnesium oxide concentration and yttrium-aluminum garnet stoichiometry deviation on the microstructure and optical transmission of yag-based ceramics
door: Malyavin, F. F., et al.
Gepubliceerd in: (2022)

X-ray luminescence of diamond composite films containing yttrium-aluminum garnet nanoparticles with varied composition of Sc–Ce doping
door: Vakalov, D. S., et al.
Gepubliceerd in: (2021)

The influence of Sc3+ions on fluorescence lifetime of Yb3+in Yb-doped yttrium scandium aluminum garnet (Yb:YSAG) ceramics
door: Nikova, M. S., et al.
Gepubliceerd in: (2022)

Effect of different fluxes on YAG:Ce illumination engineering parameters
door: Shama, M. S., et al.
Gepubliceerd in: (2018)

Diamond composite with embedded YAG:Ce nanoparticles as a source of fast X-ray luminescence in the visible and near-IR range
door: Vakalov, D. S., et al.
Gepubliceerd in: (2021)

Morphofunctional condition of bones and hippocampus of white rats at experimental intoxication with aluminium chloride
door: Timchenko, L. D., et al.
Gepubliceerd in: (2018)

The impact of yttrium aluminum garnet stoichiometry deviation on the conversion efficiency of tetravalent chromium ions
door: Malyavin, F. F., et al.
Gepubliceerd in: (2022)

Pulsed laser deposition of gallium nitride thin films on sapphire substrates
door: Devitsky, O. V., et al.
Gepubliceerd in: (2021)

Influence of the preparation "Nicavet-1000" on a morphofunctional condition of some organs of rats at experimental aluminium intoxication
door: Timchenko, L. D., et al.
Gepubliceerd in: (2018)

Determination of the complex refractive index of nanoparticulate magnetite from optical anisotropy data for magnetic colloids
door: Yerin K. V., et al.
Gepubliceerd in: (2022)

Pulsed laser deposition of aluminum nitride thin films onto sapphire substrates
door: Devitsky, O. V., et al.
Gepubliceerd in: (2020)

SPECTRAL DEPENDENCIES OF MAGNETOOPTICAL EFFECTS IN MAGNETIC FLUIDS
door: Yerin K. V., et al.
Gepubliceerd in: (2022)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
door: Tarala, V. A., et al.
Gepubliceerd in: (2018)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
door: Tarala, V. A., et al.
Gepubliceerd in: (2018)

Algorithm for the Joint Flight of Two Uncrewed Aerial Vehicles Constituting a Bistatic Radar System for the Soil Remote Sensing
door: Linets, G. I., et al.
Gepubliceerd in: (2023)

Electrically controlled reflection from a thin film at a glycerin-magnetic-liquid boundary
door: Chekanov, V. V., et al.
Gepubliceerd in: (2019)

Amorphous carbon buffer layers for separating free gallium nitride films
door: Altakhov, A. S., et al.
Gepubliceerd in: (2018)

Epitaxial growth of GaInAsBi thin films on Si (001) substrate using pulsed laser deposition
door: Pashchenko, A. S., et al.
Gepubliceerd in: (2024)

Growth of nanotextured thin films of GaInAsP and GaInAsSbBi solid solutions on GaP substrates by pulsed laser deposition
door: Pashchenko, A. S., et al.
Gepubliceerd in: (2023)

Growth of Man — like Growth of Nature
door: Emily E. D.
Gepubliceerd in: (2013)

The complex compaction method of an unstable loess substrate
door: Steshenko, D. M., et al.
Gepubliceerd in: (2018)

Improved road embankment loess substrate under earthquake hazards
door: Steshenko, D. M.
Gepubliceerd in: (2019)

Perspectives of economic growth of Russia in the conditions of information society
door: Novikova, I. V., et al.
Gepubliceerd in: (2018)

THE GROWTH OF INALN/ SI HETEROSTRUCTURES WITH A HIGH CONTENT OF IN
door: Lapin, V. A., et al.
Gepubliceerd in: (2023)