Amorphous carbon buffer layers for separating free gallium nitride films
The possibility of using amorphous diamond-like carbon (DLC) films for self-separation of gallium nitride (GaN) layers grown by hydride vapor-phase epitaxy has been analyzed. DLC films have been synthesized by plasma-enhanced chemical vapor deposition under low pressure on sapphire (Al2O3) substrate...
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Amorphous carbon buffer layers for separating free gallium nitride films
2018
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