Features of ion-beam polishing of the surface of sapphire

Features of ion-beam polishing of the surface of sapphire

The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam para...

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书目详细资料
Главные авторы:	Sysoev, I. A., Сысоев, И. А.
格式:	Статья
语言:	English
出版:	Pleiades Publishing 2018
主题:	Ar ion beam Ion-beam treatment Roughness of thesapphire surface Ion beams
在线阅读:	https://www.scopus.com/record/display.uri?eid=2-s2.0-85054654383&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=73163b622bfc400f97e8a3c6b647917e&sot=afnl&sdt=afsp&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=27&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3340
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