Features of ion-beam polishing of the surface of sapphire
The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam para...
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| Autors principals: | , |
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| Format: | Статья |
| Idioma: | English |
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Pleiades Publishing
2018
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| Accés en línia: | https://www.scopus.com/record/display.uri?eid=2-s2.0-85054654383&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=73163b622bfc400f97e8a3c6b647917e&sot=afnl&sdt=afsp&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=27&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/3340 |
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https://www.scopus.com/record/display.uri?eid=2-s2.0-85054654383&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=73163b622bfc400f97e8a3c6b647917e&sot=afnl&sdt=afsp&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=27&citeCnt=0&searchTerm=https://dspace.ncfu.ru/handle/20.500.12258/3340