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Cita APA (7th ed.)

Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Shevchenko, M. Y., Шевченко, М. Ю., . . . Мартенс, В. Я. (2018). Growth of aluminum nitride films by plasma-enhanced atomic layer deposition. Maik Nauka Publishing / Springer SBM.

Cita Chicago (17th ed.)

Tarala, V. A., et al. Growth of Aluminum Nitride Films by Plasma-enhanced Atomic Layer Deposition. Maik Nauka Publishing / Springer SBM, 2018.

Cita MLA (8th ed.)

Tarala, V. A., et al. Growth of Aluminum Nitride Films by Plasma-enhanced Atomic Layer Deposition. Maik Nauka Publishing / Springer SBM, 2018.