APA(7版)引用形式
Tarala, V. A., Тарала, В. А., Altakhov, A. S., Алтахов, А. С., Shevchenko, M. Y., Шевченко, М. Ю., . . . Мартенс, В. Я. (2018). Growth of aluminum nitride films by plasma-enhanced atomic layer deposition. Maik Nauka Publishing / Springer SBM.
Chicagoスタイル(17版)引用形式Tarala, V. A., et al. Growth of Aluminum Nitride Films by Plasma-enhanced Atomic Layer Deposition. Maik Nauka Publishing / Springer SBM, 2018.
MLA(8版)引用形式Tarala, V. A., et al. Growth of Aluminum Nitride Films by Plasma-enhanced Atomic Layer Deposition. Maik Nauka Publishing / Springer SBM, 2018.
警告: この引用は必ずしも正確ではありません.