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Research of nanosized carbon films by x-ray photoelectronic spectroscopy

Research of nanosized carbon films by x-ray photoelectronic spectroscopy

The item offers a view on an analysis of research outcomes for diamond-like carbon (DLC) thin films. The samples were synthesized through plasma enhanced chemical vapour deposition by methane (СН4) and ethane (С2Н6) using Trion Phantom III. The substrates were monocrystalline silicon wafers with an...

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Главные авторы: Valyukhov, D. P., Валюхов, Д. П., Lisitsyn, S. V., Лисицын, С. В., Pigulev, R. V., Пигулев, Р. В., Sidorov, K. I., Сидоров, К. И., Belayeva, E. N., Беляева, Е. Н.
Format: Статья
Jezik:English
Izdano: International Multidisciplinary Scientific Geoconference 2018
Teme:
Amorphous
Amorphous hydrogenated carbon
Microcrystalline
Nanocrystalline
Ultrananocrystalline
X ray photoelectron spectroscopy
Online dostop:https://www.scopus.com/record/display.uri?eid=2-s2.0-84964253520&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=2b58301f3b6527e7b3146829ec448bcf&sot=afnl&sdt=cl&cluster=scopubyr%2c%222015%22%2ct&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=44&citeCnt=0&searchTerm=
https://dspace.ncfu.ru/handle/20.500.12258/3738
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https://www.scopus.com/record/display.uri?eid=2-s2.0-84964253520&origin=resultslist&sort=plf-f&src=s&nlo=1&nlr=20&nls=afprfnm-t&affilName=north+caucasus+federal+university&sid=2b58301f3b6527e7b3146829ec448bcf&sot=afnl&sdt=cl&cluster=scopubyr%2c%222015%22%2ct&sl=53&s=%28AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29%29&relpos=44&citeCnt=0&searchTerm=
https://dspace.ncfu.ru/handle/20.500.12258/3738

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