The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles

The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles

Within the framework of the study, oriented aluminum nitride coatings were obtained on sapphire with orientation along the direction (0001) using the PEALD method at a temperature of 250°С and a number of deposition cycles from 80 to 500. The obtained samples were studied using ellipsometry, X-ray d...

Descrizione completa

Salvato in:

Dettagli Bibliografici
Autori principali:	Ambartsumov, M. G., Амбарцумов, М. Г., Tarala, V. A., Тарала, В. А., Krandievsky, S. O., Крандиевский, С. О., Kravtsov, A. A., Кравцов, А. А., Saytiev, A. B., Саутиев, А. Б., Mitrofanenko, L. M., Митрофаненко, Л. М.
Natura:	Статья
Lingua:	English
Pubblicazione:	Elsevier B.V. 2019
Soggetti:	AFM AlN Atomic layer deposition Ellipsometry PEALD X-ray diffraction Aluminum coated steel Aluminum nitride Atomic force microscopy Aluminum coatings
Accesso online:	https://www.scopus.com/record/display.uri?eid=2-s2.0-85075729953&origin=resultslist&sort=plf-f&src=s&st1=The+dependence+of+aluminum+nitride+thin-film+microstructure+on+the+number+of+low-temperature+plasma-enhanced+atomic+layer+deposition+process+cycles&st2=&sid=74064f1f4b25bf0f5642e6da8f07737a&sot=b&sdt=b&sl=162&s=TITLE-ABS-KEY%28The+dependence+of+aluminum+nitride+thin-film+microstructure+on+the+number+of+low-temperature+plasma-enhanced+atomic+layer+deposition+process+cycles%29&relpos=0&citeCnt=0&searchTerm= https://dspace.ncfu.ru/handle/20.500.12258/9109
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne! !

Documenti analoghi

Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
di: Tarala, V. A., et al.
Pubblicazione: (2018)

Growing aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
di: Tarala, V. A., et al.
Pubblicazione: (2018)

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
di: Tarala, V. A., et al.
Pubblicazione: (2018)

Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
di: Tarala, V. A., et al.
Pubblicazione: (2018)

Growing c-axis oriented aluminum nitride films by plasma-enhanced atomic layer deposition at low temperatures
di: Tarala, V. A., et al.
Pubblicazione: (2018)

Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD
di: Ambartsumov, M. G., et al.
Pubblicazione: (2021)

Judd-Ofelt Analysis of High Erbium Content Yttrium-Aluminum and Yttrium-Scandium-Aluminum Garnet Ceramics
di: Nikova, M. S., et al.
Pubblicazione: (2022)

Influence of thermal annealing on the structure and optical properties of thin aluminum nitride films on sapphire
di: Devitsky, O. V., et al.
Pubblicazione: (2021)

Impact of magnesium oxide concentration and yttrium-aluminum garnet stoichiometry deviation on the microstructure and optical transmission of yag-based ceramics
di: Malyavin, F. F., et al.
Pubblicazione: (2022)

Sintering and microstructure evolution of Er1.5Y1.5-xScx+yAl5-yO12 garnet ceramics with scandium in dodecahedral and octahedral sites
di: Nikova, M. S., et al.
Pubblicazione: (2022)

Optical spectroscopy of the Er3+ion in BaY2F8crystal and YSAG ceramics
di: Tarala, V. A., et al.
Pubblicazione: (2022)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
di: Tarala, V. A., et al.
Pubblicazione: (2018)

Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
di: Tarala, V. A., et al.
Pubblicazione: (2018)

X-ray luminescence of diamond composite films containing yttrium-aluminum garnet nanoparticles with varied composition of Sc–Ce doping
di: Vakalov, D. S., et al.
Pubblicazione: (2021)

The influence of Sc3+ions on fluorescence lifetime of Yb3+in Yb-doped yttrium scandium aluminum garnet (Yb:YSAG) ceramics
di: Nikova, M. S., et al.
Pubblicazione: (2022)

Optical properties of YSAG: Yb: Er ceramics with Sc3+ cations in the dodecahedral and octahedral positions of the garnet crystal lattice
di: Tarala, V. A., et al.
Pubblicazione: (2024)

Nanoscale Composite Protective Preparation for Cars Paint and Varnish Coatings
di: Blinov, A. V., et al.
Pubblicazione: (2022)

Dipyrazolodioxadiazocines as shelf-stable "ready-to-use" precursors for an in situ generation of enolate-iminium 1,4-dipoles: a straightforward atom-economical approach to pyrazolo[5,1-d][1,3,5]dioxazines
di: Rubin, M. A., et al.
Pubblicazione: (2020)

SYNTHESIS AND INVESTIGATION OF PROPERTIES OF COMPOSITE CERAMICS LuAG: Ce / Al2O3
di: Lapin, V. A., et al.
Pubblicazione: (2024)

Synthesis of Y3Al5O12:Ce Powders for X-ray Luminescent Diamond Composites
di: Vakalov, D. S., et al.
Pubblicazione: (2023)

Using silver nanoparticles for the increase of YAG: Ce luminescence
di: Kravtsov, A. A., et al.
Pubblicazione: (2022)

The impact of yttrium aluminum garnet stoichiometry deviation on the conversion efficiency of tetravalent chromium ions
di: Malyavin, F. F., et al.
Pubblicazione: (2022)

Investigation of the Vacuum Sintering Kinetics of the Optical Luminescent Ceramic Y3–xScxAl5O12:Cr
di: Lapin, V. A., et al.
Pubblicazione: (2024)

Ion-beam deposition of thin AlN films on Al2O3 substrate
di: Devitsky, O. V., et al.
Pubblicazione: (2020)

Pulsed laser deposition of aluminum nitride thin films onto sapphire substrates
di: Devitsky, O. V., et al.
Pubblicazione: (2020)

The microstructure of polymer functional coatings
di: Kravtsov, A. A., et al.
Pubblicazione: (2021)

Usage of atomic force microscopy for detection of the damaging effect of CdCl2 on red blood cells membrane
di: Nagdalian, A. A., et al.
Pubblicazione: (2020)

Effect of different fluxes on YAG:Ce illumination engineering parameters
di: Shama, M. S., et al.
Pubblicazione: (2018)

Study of functional coatings of polyvinyl butyral with silver nanoparticles for photovoltaic converters
di: Devitsky, O. V., et al.
Pubblicazione: (2020)

Diamond composite with embedded YAG:Ce nanoparticles as a source of fast X-ray luminescence in the visible and near-IR range
di: Vakalov, D. S., et al.
Pubblicazione: (2021)

Synthesis of titanium dioxide thin films via thermo- and plasma-enhanced atomic layer deposition
di: Ambartsumov, M. G., et al.
Pubblicazione: (2024)

Oxide Nanostructured Coating for Power Lines with Anti-Icing Effect
di: Blinov, A. V., et al.
Pubblicazione: (2022)

Polymer films with silver nanoparticles improve the spectral characteristics of photovoltaic converters
di: Devitsky, O. V., et al.
Pubblicazione: (2020)

Functional coatings with carbon quantum dots for solar cells
di: Korchagin, V. N., et al.
Pubblicazione: (2024)

Synthesis and study of thin TiO2 films doped with silver nanoparticles for the antireflection coatings and transparent contacts of photovoltaic converters
di: Kravtsov, A. A., et al.
Pubblicazione: (2018)

Effect of titanium alkoxide on structure, morphology, and biocompatible properties of sol-gel synthesized TiO2 films
di: Ambartsumov, M. G., et al.
Pubblicazione: (2024)

Effect of heavy atoms on the doublet components of the phosphorescence spectrum of triphenylene in carbon tetrachloride
di: Deryabin, M. I., et al.
Pubblicazione: (2022)

Study of cefotaxime influence on morphological changes in the cells of staphylococcus aureus by atomic force microscopy
di: Selimov, M. A., et al.
Pubblicazione: (2018)

Study of the effect of the image scanning speed and the type of conductive coating on the quality of sem-micrographs of oxide nano materials for medical use
di: Blinov, A. V., et al.
Pubblicazione: (2021)

Elemental-Phase composition of multicomponent coatings obtained on WC-Co hard alloys
di: Kazakov, D. V., et al.
Pubblicazione: (2023)