Исследование наноразмерных пленок AlN методом АСМ
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Autor principal: | Кузнецова, Е. А. |
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Format: | ВКР |
Idioma: | Russian |
Publicat: |
2018
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Accés en línia: | https://dspace.ncfu.ru:443/handle/20.500.12258/2328 |
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